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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/922

Title: ZnO AlN diamond layered structure for SAW devices combining high velocity and high electromechanical coupling coefficient
Authors: El Hakiki, M.
Elmazria, O.
Assouar, M.B.
MORTET, Vincent
Le Brizoual, L.
Vanecek, M.
Alnot, P.
Issue Date: 2005
Publisher: Elsevier
Citation: Diamond & Related Materials, 14(3-7). p. 1175-1178
Abstract: A new layered structure ZnO/AlN/diamond is studied for high frequency and high electromechanical coupling (K2) SAW devices. Theoretical study was performed to calculate the phase velocity and K2 dispersion curves of the Rayleigh mode and its higher modes as well as the leaky waves. Both high values of K2 (>4%) and acoustic velocities higher than 15km/s are expected with this new structure according to the theoretical results. To confirm the simulation results, SAW filters were processed on ZnO/AlN/diamond structure. First experimental results are in accordance with the theoretical ones and confirm the high potentiality of this new structure for the processing of high performances and high frequencies SAW filters.
URI: http://hdl.handle.net/1942/922
DOI: 10.1016/j.diamond.2005.01.002
ISI #: 000229751400178
ISSN: 0925-9635
Category: A1
Type: Journal Contribution
Validation: ecoom, 2006
Appears in Collections: Institute for Materials Research
Institute for Materials Research in MicroElectronics - Archive

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