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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/1588

Title: Wide range pressure sensor based on a piezoelectric bimorph microcantilever
Authors: MORTET, Vincent
PETERSEN, Rainer
HAENEN, Ken
D'OLIESLAEGER, Marc
Issue Date: 2006
Publisher: American Institute of Physics
Citation: APPLIED PHYSICS LETTERS, 88(13). p. 133511-...
Abstract: Since the development of the atomic force microscope, interest in microfabricated cantilevers has grown. Cantilevers are excellent micromechanical sensors. In this work, we use a commercially available piezoelectric bimorph cantilever as pressure and temperature sensor. The piezoelectric layer acts as both sensor and actuator. The sensor detects the change in the resonance frequencies due to the drag force of the surrounding gas. The frequency shift of the resonant modes is measured as a function of the pressure and the temperature. The results show that both pressure and temperature can be measured simultaneously using the piezoelectric bimorph cantilever's resonant frequencies.
URI: http://hdl.handle.net/1942/1588
DOI: 10.1063/1.2190462
ISI #: 000236465100105
ISSN: 0003-6951
Category: A1
Type: Journal Contribution
Validation: ecoom, 2007
Appears in Collections: Institute for Materials Research
Institute for Materials Research in MicroElectronics - Archive

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